Clean room standard clean room dust-free workshop grade division

At present, the clean room grades of various semiconductor processing and panel assembly factories are mostly 1000 and 100. The smaller the number, the higher the cleanliness level.

The concept of the clean room (clean room) 1000 class is: no more than 1000 dust particles per cubic foot or more;

The concept of Class 100 of clean room (clean room) is: no more than 100 dust particles per cubic foot or more;

Note: the particle size controlled by each level is also different;

According to the standard issued by the US federal government [Federal Atandard (FS) 209E, 1992], the clean room (clean room) can be divided into six levels. They are Level 1, 10, 100, 1000, 10000, and 100000;

If the level of the clean room (clean room) is described by only the number of dust particles, it can be assumed that the size of the dust particles is not 0.5 um, and the clean room level should be expressed in a series of specific dust particle sizes. For example: level 10 is 0.2um (dust size is 0.2um or more, density is not more than 75/cubic feet), level 1 is 0.1um (dust size is 0.1um or more, density is not more than 35) Pieces per cubic foot). The clean room required for integrated circuit manufacturing must have a cleanliness level better than 1000.